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Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing

✍ Scribed by Wen-Fa Wu; Bi-Shiou Chiou


Book ID
107864632
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
596 KB
Volume
247
Category
Article
ISSN
0040-6090

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