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Annealing effects on electrical and optical properties of ZnO thin-film samples deposited by radio frequency-magnetron sputtering on GaAs (001) substrates

✍ Scribed by Liu, H. F.; Chua, S. J.; Hu, G. X.; Gong, H.; Xiang, N.


Book ID
120083811
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
921 KB
Volume
102
Category
Article
ISSN
0021-8979

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## Abstract ZnO thin films were deposited onto flexible Poly‐Ethylene Terephthalate and Poly‐Ethylene Naphthalate substrates in an ultra‐high vacuum chamber by Pulsed DC Magnetron Sputtering. The process took place at room temperature and in argon atmosphere with fixed pressure, by applying two dif