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Properties of purified direct steam grown silicon thermal oxides

✍ Scribed by Sebastian Mack; Andreas Wolf; Alexandra Walczak; Benjamin Thaidigsmann; Edgar Allan Wotke; Jeffrey J. Spiegelman; Ralf Preu; Daniel Biro


Book ID
108265722
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
927 KB
Volume
95
Category
Article
ISSN
0927-0248

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