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Properties of powders deposited by silane/hydrogen and silane/methane plasmas

✍ Scribed by M.R. Lake; G.B. Smith; D.R. McKenzie; A.S. Dzurak

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma diagnostics in silane–methane–hyd

✍ V. Suendo; P. Roca i Cabarrocas 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 203 KB

Hydrogen Plasma Treatment of Silicon Dio

✍ Gupta, Vipul; Madaan, Nitesh; Jensen, David S.; Kunzler, Shawn C.; Linford, Matt 📂 Article 📅 2013 🏛 American Chemical Society 🌐 English ⚖ 940 KB

The presence of silane gas in plasma-dep

✍ T. Bekkay; R. Izquierdo; M. St-Denis; E. Sacher; A. Yelon 📂 Article 📅 1989 🏛 Elsevier Science ⚖ 289 KB

The presence of silane gas in plasma-dep

✍ T. Bekkay; R. Izquierdo; M. St-Denis; E. Sacher; A. Yelon 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 443 KB

Deposition of silicon by decomposition o

✍ M.S. Brandt; J. Chrysostomides; S. Koynov; V. Petrova-Koch 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 175 KB

Deposition of amorphous hydrogenated sem

✍ V.I. Marakhonov; N.A. Rogachev; E.I. Terukov; J.T. Ishkalov; I.N. Trapeznikova 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 152 KB