✦ LIBER ✦
Plasma diagnostics in silane–methane–hydrogen plasmas under pm-Si1−xCx:H deposition conditions: Correlation with film properties
✍ Scribed by V. Suendo; P. Roca i Cabarrocas
- Book ID
- 116669146
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 203 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0022-3093
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