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Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors

✍ Scribed by D. Girginoudi; A. Mitsinakis; M. Kotsani; N. Georgoulas; A. Thanailakis; A.G. Kontos; V.C. Stergiou; Y.S. Raptis

No coin nor oath required. For personal study only.

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