✦ LIBER ✦
Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication
✍ Scribed by B. Semmache; P. Kleimann; M. Le Berre; M. Lemiti; D. Barbier; P. Pinard
- Book ID
- 108028262
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 584 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0924-4247
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