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Properties of highly conducting ITO films prepared by ion plating

โœ Scribed by S. Takaki; K. Matsumoto; K. Suzuki


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
521 KB
Volume
33-34
Category
Article
ISSN
0169-4332

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Transparent conducting indium tin oxide (ITO) thin films were prepared on glass substrates by a magnetron sputter type negative ion source which requires cesium (Cs) vapor injection for surface negative ionization on the ITO target surface. Although the film was prepared at 70 ยฐC, it attained high o