Properties of fluorine-doped SnO2 films prepared by the pyrosol deposition method

✍ Scribed by K.H. Yoon; J.S. Song

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 549 KB
• Volume: 28
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/0927-0248(93)90119-n

✦ Synopsis

Fluorine-doped SnO 2 (SnO 2:F) films were prepared in ordinary atmosphere on heated Coming 7059 glass substrates by the pyrosol deposition method with solutions consisting of SnC14.5H20, NHaF, CH3OH, H20 and HCI. It was found that the substrate temperature and the chemical composition of the solutions largely affect the deposition rate and the properties of the SnO 2 : F films. Under the optimized deposition condition, a resistivity as low as -4.3 x 10-4 lI cm and a specular transmittance of = 79% could be attained for a -0.6 ixm thick film. X-ray diffraction measurements showed that these films were polycrystalline with the tetragonal cassiterite structure and grew with a (200) preferred orientation. The surface morphology observed by scanning electron microscopy changed from round-shape to pyramidal-shape above a substrate temperature of 450°C. A similar change in the surface morphology also took place when the CH3OH/H20 mol ratio in solution was less than 0.1. X-ray photoelectron spectroscopy indicated that the fluorine concentrations in the films, being significantly diminished, also increase with increasing the fluorine concentrations in the starting solutions.