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Properties of boron-doped ZnO thin films grown by using MOCVD

✍ Scribed by Choi, In-Hwan


Book ID
121595137
Publisher
The Korean Physical Society
Year
2013
Tongue
English
Weight
336 KB
Volume
63
Category
Article
ISSN
0374-4884

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Electrical properties of chlorine-doped
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## Abstract Chlorine‐doped ZnO thin films were grown by MOCVD on sapphire and fused silica. Chlorine is incorporated in substitution for oxygen and acts as a donor, leading to an increase of electron concentration. Transport properties were studied for samples with different chlorine content. Hall