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Preparation of Al doped ZnO thin films by MOCVD using ultrasonic atomization

✍ Scribed by Lee, C. H.; Kim, D. W.


Book ID
121553381
Publisher
Springer US
Year
2014
Tongue
English
Weight
331 KB
Volume
33
Category
Article
ISSN
1385-3449

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## Abstract Chlorine‐doped ZnO thin films were grown by MOCVD on sapphire and fused silica. Chlorine is incorporated in substitution for oxygen and acts as a donor, leading to an increase of electron concentration. Transport properties were studied for samples with different chlorine content. Hall