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Microstructure, optical and electrical properties of Al-doped ZnO films grown by MOCVD

✍ Scribed by Jianfeng Su; Chunjuan Tang; Qiang Niu; Chunhe Zang; Yongsheng Zhang; Zhuxi Fu

Book ID
116245335
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
514 KB
Volume
258
Category
Article
ISSN
0169-4332

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## Abstract Chlorine‐doped ZnO thin films were grown by MOCVD on sapphire and fused silica. Chlorine is incorporated in substitution for oxygen and acts as a donor, leading to an increase of electron concentration. Transport properties were studied for samples with different chlorine content. Hall