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Properties of aluminium oxide thin films deposited in high effective reactive pulsed magnetron sputtering process

✍ Scribed by K. Tadaszak, K. Nitsch, T. Piasecki, W. M. Posadowski

Book ID
120729597
Publisher
De Gruyter Open Sp. z o.o.
Year
2012
Tongue
English
Weight
1010 KB
Volume
30
Category
Article
ISSN
2083-1331

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