✦ LIBER ✦

Properties of a low-pressure inductive RF discharge I: Experiment

✍ Scribed by A. F. Aleksandrov; K. V. Vavilin; E. A. Kral’kina; V. B. Pavlov; A. A. Rukhadze

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of a low-pressure inductive R

✍ A. F. Aleksandrov; K. V. Vavilin; E. A. Kral’kina; V. B. Pavlov; A. A. Rukhadze 📂 Article 📅 2007 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 354 KB

SiO2film deposition in a low-pressure RF

✍ O. V. Morozov; I. I. Amirov 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 505 KB

Stationary states of a low-pressure indu

✍ A. V. Zykov; K. I. Polozhii 📂 Article 📅 2000 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 57 KB

Self-consistent model of a low-pressure

✍ A. S. Smirnov; K. E. Orlov 📂 Article 📅 1997 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 80 KB

Kinetics of an RF low-pressure discharge

✍ V. I. Strunin; A. A. Lyakhov; G. Zh. Khudaibergenov; V. V. Shkurkin 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 46 KB

Low-pressure inductive rf discharge in a

✍ A. P. Golovitskii 📂 Article 📅 1998 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 45 KB