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Stationary states of a low-pressure inductively coupled RF discharge near the quenching threshold

✍ Scribed by A. V. Zykov; K. I. Polozhii


Book ID
110124366
Publisher
SP MAIK Nauka/Interperiodica
Year
2000
Tongue
English
Weight
57 KB
Volume
26
Category
Article
ISSN
1063-7850

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