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Properties and preparation conditions of carbon nitride thin films deposited by laser CVD

✍ Scribed by F. Falk; J. Meinschien; K. Schuster; H. Stafast

Book ID: 118519086
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 369 KB
Volume: 36
Category: Article
ISSN: 0008-6223
DOI: 10.1016/s0008-6223(98)00003-7

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