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Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y – X LiNbO 3 Structures

✍ Scribed by Ro, Ruyen; Lee, Ruyue; Wu, Sean; Lin, Zhi-Xun; Lee, Maw-Shung

Book ID
120066998
Publisher
Institute of Pure and Applied Physics
Year
2009
Tongue
English
Weight
381 KB
Volume
48
Category
Article
ISSN
0021-4922

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Surface acoustic wave device properties
Surface acoustic wave device properties of (B, Al)N films on 128° Y–X LiNbO3 substrate
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A c-axis orientated aluminium nitride (AlN) film on a 128 • Y-X lithium niobate (LiNbO 3 ) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient (k 2 ) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis