The characteristics of surface acoustic waves on AlN/LiNbO3substrates
β Scribed by K.S. Kao; C.C. Cheng; Y.C. Chen; Y.H. Lee
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 211 KB
- Volume
- 76
- Category
- Article
- ISSN
- 1432-0630
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A c-axis orientated aluminium nitride (AlN) film on a 128 β’ Y-X lithium niobate (LiNbO 3 ) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient (k 2 ) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis
The paper discusses the existence of non-attenuating surface acoustic waves (SAWs) propagating on piezoelectric substrates of arbitrary anisotropy with the velocity exceeding that of the transverse bulk waves. Such fast SAW appears at specially selected orientations of the substrate. As applied to S