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Profile studies of MeV ions implanted into Si

✍ Scribed by H. Wong; E. Deng; N.W. Cheung; P.K. Chu; E.M. Strathman; M.D. Strathman


Book ID
113278776
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
290 KB
Volume
21
Category
Article
ISSN
0168-583X

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