✦ LIBER ✦

Anomalous depth profile of implanted fluorine ions in SiO2/Si

✍ Scribed by K Hanamoto; H Yoshimoto; T Hosono; A Hirai; Y Kido; Y Nakayama; R Kaigawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Three-dimensional depth profiles of boro

✍ Jenq-Horng Liang 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 110 KB

Properties of the fluorine-implanted Si-

✍ G.S. Virdi; C.M.S. Rauthan; B.C. Pathak; W.S. Khokle 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 359 KB

Anomalous defect processes in Si implant

✍ Fujita Tetsuo; Fukui Minoru; Okada Syunji; Shimizu-Iwayama Tsutomu; Hioki Tatsum 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 347 KB

Electroluminescence of ion-implanted Si-

✍ A. P. Baraban; P. P. Konorov; L. V. Malyavka; A. G. Troshikhin 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 54 KB

Anomalous depth profiles of light ions a

✍ R.B. Guimarães; L. Amaral; M. Behar; F.C. Zawislak; D. Fink 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 429 KB

O2+ and Xe+ depth profiling of 150 keV C

✍ M.K. Bhan; J.A. Kilner 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 436 KB