Production of zinc oxide thin films, and manufacture of PV element

• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 118 KB
• Volume: 2003
• Category: Article
• ISSN: 1473-8325
• DOI: 10.1016/s1473-8325(03)00530-3

✦ Synopsis

Assignee: Canon, Japan

In this invention a method of producing a thin film of zinc oxide is described, comprising electrochemical deposition of a thin film of zinc oxide on a conductive substrate. The film formation rate is varied at least once during the electrolytic deposition reaction. This provides several advantages, such as the means to form a texture-structured thin film effective in optical confinement in a short time, lower production cost, uniformity with excellent adhesion, and improved photoelectric characteristics for a stacked structure photovoltaic element.