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Production of poly-p-xylylene films from the gas phase and the study of the film properties

✍ Scribed by N.Ya Marushii; B.V Trachuk; V.I Pavlov; N.N Silich


Book ID
118964880
Publisher
Elsevier Science
Year
1975
Weight
578 KB
Volume
17
Category
Article
ISSN
0032-3950

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