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Processing of nano-holes and pores on SiO2 thin films by MeV heavy ions

✍ Scribed by C. Milanez Silva; P. Varisco; A. Moehlecke; P.P. Fichtner; R.M. Papaléo; J. Eriksson

Book ID
114167135
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
133 KB
Volume
206
Category
Article
ISSN
0168-583X

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Ultra-slow single and multicharged ions (USMCIs) can be used for surface preparation at room temperature, to engineer the top atomic layers of surfaces without modifying the substrate below, in processes such as ultra-thin films growth, etching, deposition, or nanostructures fabrication. The energy