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Electronic sputtering of thin SiO2 films by MeV heavy ions

✍ Scribed by W.M. Arnoldbik; N. Tomozeiu; F.H.P.M. Habraken


Book ID
114166800
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
154 KB
Volume
203
Category
Article
ISSN
0168-583X

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