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Processing issues in silicon nanocrystal manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications

✍ Scribed by P. Normand; P. Dimitrakis; E. Kapetanakis; D. Skarlatos; K. Beltsios; D. Tsoukalas; C. Bonafos; H. Coffin; G. Benassayag; A. Claverie; V. Soncini; A. Agarwal; Ch. Sohl; M. Ameen

Book ID: 113797681
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 281 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.03.043

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