✦ LIBER ✦
Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications
✍ Scribed by P. Dimitrakis; A. Mouti; C. Bonafos; S. Schamm; G. Ben Assayag; V. Ioannou-Sougleridis; B. Schmidt; J. Becker; P. Normand
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 587 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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