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Processing and Applications of Aerosol-Assisted Chemical Vapor Deposition

✍ Scribed by X. Hou; K.-L. Choy


Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
659 KB
Volume
12
Category
Article
ISSN
0948-1907

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Special Issue on Aerosol-Assisted Chemic
✍ Kwang-Leong Choy πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 76 KB πŸ‘ 1 views

## Abstract As a variant of conventional CVD, AACVD involves atomization of a liquid precursor into fine aerosol droplets that are delivered to a heated zone where evaporation, decomposition, and subsequent CVD reactions occur. In this editorial, Guest Editor Kwang‐Leong Choy provides a brief overv