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Process-Structure-Reflectance Correlations for TiB2 Films Prepared by Chemical Vapor Deposition

✍ Scribed by Bruce N. Beckloff; W. Jack Lackey

Book ID: 110090077
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 875 KB
Volume: 82
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1999.tb01794.x

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