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Spectroscopic ellipsometry of RuO2 films prepared by metalorganic chemical vapor deposition

✍ Scribed by Hones, Peter; Gerfin, Tobias; GraÌtzel, Michael

Book ID: 120634352
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 282 KB
Volume: 67
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.114870

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