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Process Parameters Optimization: A Design Study for TiO$_{2}$ Thin Film of Vacuum Sputtering Process

✍ Scribed by . Wen-hsien Ho; . Jinn-tsong Tsai; . Gong-ming Hsu; . Jyh-horng Chou

Book ID: 125522679
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 175 KB
Volume: 7
Category: Article
ISSN: 1545-5955
DOI: 10.1109/TASE.2009.2023673

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