Optimization of process parameters for the electrical properties in Ga-doped ZnO thin films prepared by r.f. magnetron sputtering

✍ Scribed by Zhu, D.L.; Wang, Q.; Han, S.; Cao, P.J.; Liu, W.J.; Jia, F.; Zeng, Y.X.; Ma, X.C.; Lu, Y.M.

• Book ID: 121787239
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 1019 KB
• Volume: 298
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2014.01.163