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Process-induced stress and microcrack nucleation in GaAs wafers

✍ Scribed by Allan Ward; Robert W. Hendricks

Book ID: 107457707
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 839 KB
Volume: 27
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-998-0102-7

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