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Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing

✍ Scribed by Talid Sinno; Jianguo Dai; Sumeet S. Kapur

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 724 KB
Volume: 159-160
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2008.12.040

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