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Laser-induced stress wave thermometry applied to silicon wafer processing: Modeling and experimentation

✍ Scribed by G. A. Rabroker; C. S. Suh; R. Chona

Book ID: 105570256
Publisher: Sage Publications
Year: 2005
Tongue: English
Weight: 737 KB
Volume: 45
Category: Article
ISSN: 0014-4851
DOI: 10.1007/bf02428984

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