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Process Induced Crystal Defects in Dislocation-Free n-Type Silicon Material

✍ Scribed by Dipl.- Ing. W. Fischer; Doz. Dr. sc. techn. G. Heymann

Publisher: John Wiley and Sons
Year: 1979
Tongue: English
Weight: 729 KB
Volume: 14
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.19790140706

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