✦ LIBER ✦
A chromium-free etchant for delineation of defects in heavily doped n-type silicon wafers
✍ Scribed by Yuheng Zeng; Deren Yang; Xiangyang Ma; Zhidan Zeng; Duanlin Que; Longfei Gong; Daxi Tian; Liben Li
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 509 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1369-8001
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