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Process characteristics and film properties upon growth of TiO x films by high power pulsed magnetron sputtering

โœ Scribed by Sarakinos, K; Alami, J; Wuttig, M

Book ID
121311235
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
347 KB
Volume
40
Category
Article
ISSN
0022-3727

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