✦ LIBER ✦
Effect of nitrogen doping on TiO x N y thin film formation at reactive high-power pulsed magnetron sputtering
✍ Scribed by Stranak, Vitezslav; Quaas, Marion; Bogdanowicz, Robert; Steffen, Hartmut; Wulff, Harm; Hubicka, Zdenek; Tichy, Milan; Hippler, Rainer
- Book ID
- 121439849
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 568 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0022-3727
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