𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Problems of the nanoimprinting technique for nanometer scale pattern definition

✍ Scribed by Scheer, H.-C.


Book ID
127081795
Publisher
AVS (American Vacuum Society)
Year
1998
Tongue
English
Weight
952 KB
Volume
16
Category
Article
ISSN
0734-211X

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