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Problem of mechanism in Si autoepitaxy with condensation from molecular beams in vacuum: A V Popov et al, Sb Nauchn Tr Probl Mikroelektron, Mosk Inst Elektron Tekh, 4, 1969, 102–108 (in Russian)


Publisher
Elsevier Science
Year
1971
Tongue
English
Weight
151 KB
Volume
21
Category
Article
ISSN
0042-207X

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