Probing the Nucleation of $\hbox{Al}_{2}\hbox{O}_{3}$ in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions

✍ Scribed by Elliot, A. J.; Malek, G.; Wille, L.; Lu, R.; Han, S.; Wu, J. Z.; Talvacchio, J.; Lewis, R. M.

• Book ID: 121477570
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 371 KB
• Volume: 23
• Category: Article
• ISSN: 1051-8223
• DOI: 10.1109/TASC.2013.2247452