Fabrication of $\hbox{Nb/Al}_{2}\hbox{O}_{3}/\hbox{Nb}$ Josephson Junctions Using In Situ Magnetron Sputtering and Atomic Layer Deposition

✍ Scribed by Rongtao Lu, ; Elliot, A. J.; Wille, L.; Bo Mao, ; Siyuan Han, ; Wu, J. Z.; Talvacchio, J.; Schulze, H. M.; Lewis, R. M.; Ewing, D. J.; Yu, H. F.; Xue, G. M.; Zhao, S. P.

• Book ID: 121477569
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 386 KB
• Volume: 23
• Category: Article
• ISSN: 1051-8223
• DOI: 10.1109/TASC.2012.2236591