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Preparation of Zr–Si thin films by a simultaneous deposition and reaction process using pulsed ion beams

✍ Scribed by H. Suematsu; T. Kishi; J. Inoue; M. Hirai; T. Suzuki; T. Yunogami; W. Jiang; K. Yatsui

Book ID: 113790756
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 552 KB
Volume: 61
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2006.12.004

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