✦ LIBER ✦
Preparation of Hf-Si-O films by simultaneous deposition and reaction process using pulsed ion-beam evaporation
✍ Scribed by Tetsuya Nagahama; Tsunetoshi Arikado; Hisayuki Suematsu; Weihua Jiang; Kiyoshi Yatsui
- Book ID
- 102821386
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 627 KB
- Volume
- 152
- Category
- Article
- ISSN
- 0424-7760
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