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Preparation of ZnO films on sapphire (01(ar 1)2) substrates by low-pressure organometallic chemical vapour deposition

✍ Scribed by K. Kobayasm; T. Matsubara; S. Matsushima; S. Shirakata; S. Isomura; G. Okada

No coin nor oath required. For personal study only.

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Preparation of ZnO films on sapphire (01(ar 1)2) substrates by low-pressure organometallic chemical vapour deposition