✦ LIBER ✦
High frequency C-V investigation of metal-oxide-semiconductor capacitors prepared by low temperature subatmospheric pressure chemical vapour deposition of SiO2 films on silicon substrates
✍ Scribed by C. Pavelescu; J.P. McVittie; C. Chang; K.C. Saraswat; J.Y. Leong
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 593 KB
- Volume
- 217
- Category
- Article
- ISSN
- 0040-6090
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