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Preparation of Titanium Nitride Films from Amide Precursors Synthesized by Electrolysis

✍ Scribed by Shiro Shimada; Marika Hasegawa

Book ID: 108575512
Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 502 KB
Volume: 86
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.2003.tb03298.x

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