Preparation of TiN thin films by the dynamic mixing method using an N2+ ion beam of 1 keV

✍ Scribed by I. Takano; S. Isobe; T.A. Sasaki; Y. Baba

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 521 KB
• Volume: 171
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90633-0