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Preparation of Thin Specimen Films

✍ Scribed by HAST, NILS

Book ID
109550649
Publisher
Nature Publishing Group
Year
1947
Tongue
English
Weight
404 KB
Volume
159
Category
Article
ISSN
0028-0836

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## Abstract We have developed a technique for preparation of cross‐sectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and N