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Preparation of thick YBa2Cu3O7−δfilms by dc magnetron sputtering

✍ Scribed by E. K. Hollmann; D. A. Plotkin; S. V. Razumov; A. V. Tumarkin

Book ID
110123755
Publisher
SP MAIK Nauka/Interperiodica
Year
1998
Tongue
English
Weight
204 KB
Volume
24
Category
Article
ISSN
1063-7850

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In situ thin films of YBa2Cu3O7 prepared
In situ thin films of YBa2Cu3O7 prepared by single target DC-magnetron sputtering
✍ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; Ø. Fischer 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible